Format: PNG, CSVPublisher: IEEE DataPortPublication Date of the Electronic Edition: 12/07/2025
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ISBN: 10.21227/q1bh-dh57
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Description
This dataset contains 20,000 synthetic 128×128 layout-style images for D2DB inspection research. Each sample includes a binary CAD image (lines, rectangles, vias), a physics-rendered lithography-style image, and a SEM-like noisy image. Three classes are provided: clean (no defect), geom_var (geometric/process variation only), and topo_defect (true topological defects: bridge, open, missing_via). Metadata (metadata.csv) lists ID, split (train/val/test), class, defect_type, and paths to cad/physics/sem PNGs. Generated with the accompanying Python script using only common libraries (numpy, OpenCV, Pillow, pandas). Suitable for benchmarking die-to-database and defect detection methods without proprietary layout data.
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Delivery time: Instant
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